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Publication Citation: Measuring the effects of low energy ion milling on the magnetization of Co/Pd multilayers using scanning electron microscopy with polarization analysis

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Author(s): Benjamin James McMorran; Aaron C. Cochran; Randy K. Dumas; Kai Liu; Paul Morrow; Daniel T. Pierce; John Unguris;
Title: Measuring the effects of low energy ion milling on the magnetization of Co/Pd multilayers using scanning electron microscopy with polarization analysis
Published: April 30, 2010
Abstract: The dependence of the magnetic properties of Co/Pd multilayer films with very thin individual layers, Co(0.4nm)/Pd(0.6nm), on the energy of ion milling is investigated using scanning electron microscopy with polarization analysis (SEMPA). The effect of Ar ion milling on the Co/Pd magnetization angle distribution is compared for ion milling at 50 eV, 1 keV, and 2 keV. We find that 1 keV and 2 keV Ar ion milling causes a measureable change in the out-of-plane magnetization angle distribution as material is removed, but ion milling with 50 eV Ar ions does not significantly alter the magnetization distribution. This enables quantitative imaging of all three vector components of the surface magnetization of the Co/Pd multilayer films with 20 nm spatial resolution using SEMPA.
Citation: Journal of Applied Physics
Volume: 107
Issue: 9
Pages: 3 pp.
Keywords: magnetisim; multilayer; Co/Pd; SEMPA; vertical anisotropy; ion milling
Research Areas: Nanomagnetics
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