NIST logo

Publication Citation: Silicon Nanowire NVM with High-k Gate Dielectric Stack

NIST Authors in Bold

Author(s): Xiaoxiao Zhu; D. Gu; Qiliang Li; D. Ioannoua; H. Baumgart; John S. Suehle; Curt A. Richter;
Title: Silicon Nanowire NVM with High-k Gate Dielectric Stack
Published: September 01, 2009
Abstract:
Citation: Microelectronic Engineering
Volume: 86
Issue: 7-9
Pages: pp. 1957 - 1960
Research Areas: Semiconductor Materials