NIST logo

Publication Citation: Micro-feature dimensional and form measurements with the NIST fiber probe on a CMM

NIST Authors in Bold

Author(s): Balasubramanian Muralikrishnan; Jack A. Stone Jr; John R. Stoup; Chittaranjan Sahay;
Title: Micro-feature dimensional and form measurements with the NIST fiber probe on a CMM
Published: July 30, 2010
Abstract: The NIST fiber probe is a Coordinate Measuring Machine (CMM) probing system intended for diameter and form measurement of micro features and small holes. This Moore M48 CMM at NIST can measure holes down to 500 um diameter with the Movamatic probe; the NIST fiber probe extends the range to less than 100 um diameter. Over the last several years, we have performed numerous precision dimensional and form measurements using this probe mounted on the M48 CMM. We have measured size (diameter and thickness) and form (circularity, sphericity, straightness, flatness, conicity) on artifacts such as fiber optic ferrules, fuel injector nozzle holes, knife-edge and cylindrical apertures, ruby spheres, gage blocks, micro gears, and other micro-features on meso-scale components. We briefly describe the probing system and then present a few of the different applications we have studied, highlighting the challenges they represent and the measurement advances our probing system has offered. More importantly, these applications serve to highlight a new calibration service the dimensional measurement of micro-features at ultra-low forces - that NIST can now offer industry.
Citation: Cal Lab: International Journal of Metrology
Pages: 12 pp.
Keywords: dimensional metrology; fiber probe; micro feature;
Research Areas: Dimensional Metrology
PDF version: PDF Document Click here to retrieve PDF version of paper (387KB)