Publication Citation
NIST Authors in Bold
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| Author(s): | P Chi; |
|---|---|
| Title: | Anomalies in Shallow Depth Profiles of Boron in Silicon |
| Published: | February 01, 1998 |
| Abstract: | |
| Conference: | 11th International Conference on Secondary Ion Mass Spectrometry (SIMS XI) |
| Proceedings: | Secondary Ion Mass Spectrometry SIMS XI |
| Volume: | 11 |
| Pages: | pp. 321 - 324 |
| Location: | Orlando, FL |
| Dates: | September 7-12, 1997 |
| Research Areas: | Chemistry |