NIST logo

Publication Citation: Anomalies in Shallow Depth Profiles of Boron in Silicon

NIST Authors in Bold

Author(s): P Chi;
Title: Anomalies in Shallow Depth Profiles of Boron in Silicon
Published: February 01, 1998
Abstract:
Conference: 11th International Conference on Secondary Ion Mass Spectrometry (SIMS XI)
Proceedings: Secondary Ion Mass Spectrometry SIMS XI
Volume: 11
Pages: pp. 321 - 324
Location: Orlando, FL
Dates: September 7-12, 1997
Research Areas: Chemistry