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Publication Citation: Charaterization of PFC Emissions from Semiconductor Process Tools

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Author(s): David S. Green; J. Meyers;
Title: Charaterization of PFC Emissions from Semiconductor Process Tools
Published: September 01, 1998
Abstract:
Proceedings: Proceedings of the US EPA Global Semiconductor Industry Conference on PFC Emission Control
Location: -1
Research Areas: Semiconductors, Chemistry