NIST logo

Publication Citation: Lateral Uniformity in Chemical Composition along a Buried Reaction Front in Polymers

NIST Authors in Bold

Author(s): Kristopher Lavery; Vivek M. Prabhu; Sushil K. Satija; Wen-Li Wu;
Title: Lateral Uniformity in Chemical Composition along a Buried Reaction Front in Polymers
Published: November 15, 2010
Abstract: Off-specular neutron reflectometry was applied to characterize the form and amplitude of lateral compositional variations at a buried reaction-diffusion front. In this work, off-specular neutron measurements were first calibrated using off-specular X-ray reflectivity and atomic force microscopy via a roughened glass surface, both as a free surface and as a buried interface that was prepared by spin coating thin polymer films upon the glass surface. All three methods provided consistent roughness values despite the difference in their detection mechanism. Our neutron results demonstrated, for the first time, that the compositional heterogeneity at a buried reaction front can be measured; the model system used in this study mimics the deprotection reaction occurred in photolithographic process, a vital process in making integrated circuits.
Citation: Journal of Physics-Condensed Matter
Keywords: polymer;neutron reflectivity; off-specular reflectivity; thin film; photoresist;
Research Areas: Optical lithography, Polymers, CRADA, Soft Condensed Matter
PDF version: PDF Document Click here to retrieve PDF version of paper (781KB)