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Publication Citation: Radiochemical Neutron Activation Analysis for Certification of Ion-Implanted Phosphorus in Silicon

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Author(s): Rick L. Paul; David S. Simons; William F. Guthrie; John Lu;
Title: Radiochemical Neutron Activation Analysis for Certification of Ion-Implanted Phosphorus in Silicon
Published: July 11, 2003
Abstract:
Citation: Analytical Chemistry
Volume: 75
Issue: 16
Pages: pp. 4028 - 4033
Research Areas: Chemistry