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Radiochemical Neutron Activation Analysis for Certification of Ion-Implanted Phosphorus in Silicon

Published

Author(s)

Rick L. Paul, David S. Simons, William F. Guthrie, John Lu
Citation
Analytical Chemistry
Volume
75
Issue
16

Citation

Paul, R. , Simons, D. , Guthrie, W. and Lu, J. (2003), Radiochemical Neutron Activation Analysis for Certification of Ion-Implanted Phosphorus in Silicon, Analytical Chemistry (Accessed April 25, 2024)
Created July 11, 2003, Updated March 29, 2017