NIST logo

Publication Citation: Enhanced Spatial Resolution Scanning Kelvin Force Microscopy Using Conductive Carbon Nanotube Tips

NIST Authors in Bold

Author(s): Joseph J. Kopanski; Paul McClure; Vladimir Mancevski;
Title: Enhanced Spatial Resolution Scanning Kelvin Force Microscopy Using Conductive Carbon Nanotube Tips
Published: October 05, 2009
Abstract: The response of a scanning Kelvin force microscope (SKFM) was measured with conventional micromachined silicon tips coated with Au and with advanced tips terminated with a carbon nanotube (CNT). A simple model of the SKFM predicts enhanced spatial resolution of SKFM using a CNT terminated tip because it reduces the stray capacitance components due to the tip shank and the cantilever. Measurements over abrupt boundaries between Au and silicon (with a thin silicon dioxide overlayer) show the predicted enhanced spatial resolution.
Conference: Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Proceedings: AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Pages: pp. 212 - 216
Location: Albany, NY
Dates: May 11-14, 2009
Keywords: carbon nanotube, scanning Kelvin force microscope, SKFM, spatial resolution, work function
Research Areas: Characterization, Nanometrology, and Nanoscale Measurements
PDF version: PDF Document Click here to retrieve PDF version of paper (467KB)