| Author(s): |
Joseph J. Kopanski; Paul McClure; Vladimir Mancevski; |
| Title: |
Enhanced Spatial Resolution Scanning Kelvin Force Microscopy Using Conductive Carbon Nanotube Tips |
| Published: |
October 05, 2009 |
| Abstract: |
The response of a scanning Kelvin force microscope (SKFM) was measured with conventional micromachined silicon tips coated with Au and with advanced tips terminated with a carbon nanotube (CNT). A simple model of the SKFM predicts enhanced spatial resolution of SKFM using a CNT terminated tip because it reduces the stray capacitance components due to the tip shank and the cantilever. Measurements over abrupt boundaries between Au and silicon (with a thin silicon dioxide overlayer) show the predicted enhanced spatial resolution. |
| Conference: |
Frontiers of Characterization and Metrology for Nanoelectronics: 2009 |
| Proceedings: |
AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009 |
| Pages: |
pp. 212 - 216 |
| Location: |
Albany, NY |
| Dates: |
May 11-14, 2009 |
| Keywords: |
carbon nanotube, scanning Kelvin force microscope, SKFM, spatial resolution, work function |
| Research Areas: |
Characterization, Nanometrology, and Nanoscale Measurements |
| PDF version: |
 Click here to retrieve PDF version of paper (456KB) |
