Take a sneak peek at the new NIST.gov and let us know what you think!
(Please note: some content may not be complete on the beta site.).
NIST Authors in Bold
|Author(s):||Joseph J. Kopanski; Paul McClure; Vladimir Mancevski;|
|Title:||Enhanced Spatial Resolution Scanning Kelvin Force Microscopy Using Conductive Carbon Nanotube Tips|
|Published:||October 05, 2009|
|Abstract:||The response of a scanning Kelvin force microscope (SKFM) was measured with conventional micromachined silicon tips coated with Au and with advanced tips terminated with a carbon nanotube (CNT). A simple model of the SKFM predicts enhanced spatial resolution of SKFM using a CNT terminated tip because it reduces the stray capacitance components due to the tip shank and the cantilever. Measurements over abrupt boundaries between Au and silicon (with a thin silicon dioxide overlayer) show the predicted enhanced spatial resolution.|
|Conference:||Frontiers of Characterization and Metrology for Nanoelectronics: 2009|
|Proceedings:||AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009|
|Pages:||pp. 212 - 216|
|Dates:||May 11-14, 2009|
|Keywords:||carbon nanotube, scanning Kelvin force microscope, SKFM, spatial resolution, work function|
|Research Areas:||Characterization, Nanometrology, and Nanoscale Measurements|
|PDF version:||Click here to retrieve PDF version of paper (467KB)|