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Publication Citation: Cleaning of diamond nanoindentation probes with oxygen plasma and carbon dioxide snow

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Author(s): Dylan Morris;
Title: Cleaning of diamond nanoindentation probes with oxygen plasma and carbon dioxide snow
Published: December 07, 2009
Abstract: Diamond nanoindentation probes may perform many thousands of indentations over years of service life. There is general agreement that the probes need frequent cleaning, but techniques for doing so are mostly anecdotes shared between experimentalists. In preparation for the measurement of the shape of a nanoindentation probe by a scanning probe microscope, cleaning by carbon dioxide snow jets and oxygen plasma was investigated. Repeated indentation on a thumbprint-contaminated surface formed a compound that was very resistant to removal by solvents, CO2 snow and plasma. CO2 snow cleaning is found to be a generally effective cleaning procedure.
Citation: Review of Scientific Instruments
Volume: 80
Pages: 3 pp.
Keywords: nanoindentation, plasma, carbon dioxide snow, cleaning
Research Areas: Nanomechanics, Nanometrology
PDF version: PDF Document Click here to retrieve PDF version of paper (180KB)