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Publication Citation: High Dynamic Range SIMS Depth Profiling on In Situ Ion-beam-generated Mesas Using the Ion Microscope

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Author(s): John G. Gillen;
Title: High Dynamic Range SIMS Depth Profiling on In Situ Ion-beam-generated Mesas Using the Ion Microscope
Published: July 01, 1992
Abstract:
Citation: Surface and Interface Analysis
Volume: 18
Issue: 11
Pages: pp. 777 - 780
Research Areas: Nanotechnology, Chemistry