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Publication Citation: Analog BIST Functionality for Microhotplate Temperature Sensors

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Author(s): Muhammad Y. Afridi; Christopher B. Montgomery; Elliott cooper-Balis; Stephen Semancik; Kenneth G. Kreider; Jon C. Geist;
Title: Analog BIST Functionality for Microhotplate Temperature Sensors
Published: September 01, 2009
Abstract: In this paper we describe a novel microhotplate temperature sensor calibration technique suitable for Built-In Self Test. The technique only requires short-term temperature stability from the four-wire polysilicon heater/temperature sensors that are commonly used in microhotplates, and relies on the long term temperature stability of different types of temperature sensors, which may not be suitable for direct calibration.
Citation: IEEE Electron Device Letters
Volume: 30
Issue: 9
Pages: pp. 928 - 930
Keywords: Microhotplate; Calibration; Temperature sensor; BIST; Platinum-Rhodium; Thermocouple
Research Areas: Measurements
PDF version: PDF Document Click here to retrieve PDF version of paper (263KB)