| Author(s): |
Muhammad Y. Afridi; Christopher B. Montgomery; Elliott cooper-Balis; Stephen Semancik; Kenneth G. Kreider; Jon C. Geist; |
| Title: |
Analog BIST Functionality for Microhotplate Temperature Sensors |
| Published: |
September 01, 2009 |
| Abstract: |
In this paper we describe a novel microhotplate temperature sensor calibration technique suitable for Built-In Self Test. The technique only requires short-term temperature stability from the four-wire polysilicon heater/temperature sensors that are commonly used in microhotplates, and relies on the long term temperature stability of different types of temperature sensors, which may not be suitable for direct calibration. |
| Citation: |
IEEE Electron Device Letters |
| Volume: |
30 |
| Issue: |
9 |
| Pages: |
pp. 928 - 930 |
| Keywords: |
Microhotplate; Calibration; Temperature sensor; BIST; Platinum-Rhodium; Thermocouple |
| Research Areas: |
Measurements |
| PDF version: |
 Click here to retrieve PDF version of paper (257KB) |
