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|Author(s):||Muhammad Y. Afridi; Christopher B. Montgomery; Elliott cooper-Balis; Stephen Semancik; Kenneth G. Kreider; Jon C. Geist;|
|Title:||Analog BIST Functionality for Microhotplate Temperature Sensors|
|Published:||September 01, 2009|
|Abstract:||In this paper we describe a novel microhotplate temperature sensor calibration technique suitable for Built-In Self Test. The technique only requires short-term temperature stability from the four-wire polysilicon heater/temperature sensors that are commonly used in microhotplates, and relies on the long term temperature stability of different types of temperature sensors, which may not be suitable for direct calibration.|
|Citation:||IEEE Electron Device Letters|
|Pages:||pp. 928 - 930|
|Keywords:||Microhotplate, Calibration, Temperature sensor, BIST, Platinum-Rhodium, Thermocouple|
|PDF version:||Click here to retrieve PDF version of paper (263KB)|