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Publication Citation: Characterization of Surface Topography

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Author(s): Theodore V. Vorburger; John A. Dagata; G. Wilkening; K Iizuka;
Title: Characterization of Surface Topography
Published: January 01, 1998
Abstract: Abstract not available.
Citation: Methods of Surface Characterization, Volume 5, Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis, edited by A. W. Czanderna, T. E. Madey, C. J. Powell
Publisher: Plenum Press, New York, NY
Volume: 5
Pages: pp. 275 - 354
Research Areas: Metrology, Manufacturing