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Publication Citation: Surface Metrology of Soft X-ray Optics

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Author(s): Theodore V. Vorburger; T. McWade; Joseph Fu; Christopher J. Evans; William T. Estler; R Parks;
Title: Surface Metrology of Soft X-ray Optics
Published: January 01, 1993
Abstract: Abstract not available.
Proceedings: Proceedings of 3rd Soft X-ray Projection Lithography, Optical Society of America, Washington, DC, 1993
Location: Unknown, -1
Dates: January 1, 1993
Research Areas: Metrology, Manufacturing