Publication Citation
NIST Authors in Bold
 |
| Author(s): | Theodore V. Vorburger; T. McWade; Joseph Fu; Christopher J. Evans; William T. Estler; R Parks; |
|---|---|
| Title: | Surface Metrology of Soft X-ray Optics |
| Published: | January 01, 1993 |
| Abstract: | Abstract not available. |
| Proceedings: | Proceedings of 3rd Soft X-ray Projection Lithography, Optical Society of America, Washington, DC, 1993 |
| Location: | Unknown, -1 |
| Dates: | January 1, 1993 |
| Research Areas: | Metrology, Manufacturing |