| Author(s): |
R N. Watts; Charles S. Tarrio; Thomas B. Lucatorto; R P. Madden; R Deslattes; Ariel Caticha; William T. Estler; Christopher J. Evans; T. McWade; Joseph Fu; Theodore V. Vorburger; |
| Title: |
XUV Optics Characterization at the National Institute of Standards and Technology |
| Published: |
January 01, 1993 |
| Abstract: |
Abstract not available. |
| Citation: |
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms |
| Volume: |
B79 |
| Pages: |
pp. 244 - 246 |
| Research Areas: |
Metrology, Manufacturing |
