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Publication Citation: XUV Optics Characterization at the National Institute of Standards and Technology

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Author(s): R N. Watts; Charles S. Tarrio; Thomas B. Lucatorto; R P. Madden; R Deslattes; Ariel Caticha; William T. Estler; Christopher J. Evans; T. McWade; Joseph Fu; Theodore V. Vorburger;
Title: XUV Optics Characterization at the National Institute of Standards and Technology
Published: January 01, 1993
Abstract: Abstract not available.
Citation: Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms
Volume: B79
Pages: pp. 244 - 246
Research Areas: Metrology, Manufacturing