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NIST Authors in Bold
|Author(s):||Stephen Knight; Vivek M. Prabhu; John H. Burnett; James A. Liddle; Christopher L. Soles; Alain C. Diebold;|
|Published:||March 01, 2011|
|Abstract:||This is a compiled chapter that will be included into the Handbook of Nanophysics.|
|Citation:||Handbook of Nanophysics|
|Publisher:||Taylor & Francis, London, -1|
|Keywords:||lithography, photoresist, electron beam, nanoimprint, metrology, DUV, EUV, ITRS roadmap|
|Research Areas:||Direct-write lithography, Optical lithography, Inspection, Nanofabrication, Nanomanufacturing, and Nanoprocessing, Nanoimprint lithography, Electron beam lithography (EBL), Roadmaps|