Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Nanoelectronics Lithography

Published

Author(s)

Stephen Knight, Vivek Prabhu, John H. Burnett, James Alexander Liddle, Christopher Soles, Alain C. Diebold

Abstract

This is a compiled chapter that will be included into the Handbook of Nanophysics.
Citation
Handbook of Nanophysics
Publisher Info
Taylor & Francis, London, -1

Keywords

lithography, photoresist, electron beam, nanoimprint, metrology, DUV, EUV, ITRS roadmap

Citation

Knight, S. , Prabhu, V. , Burnett, J. , Liddle, J. , Soles, C. and Diebold, A. (2011), Nanoelectronics Lithography, Handbook of Nanophysics, Taylor & Francis, London, -1, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901888 (Accessed March 18, 2024)
Created February 28, 2011, Updated October 14, 2021