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Publication Citation: Nanoelectronics Lithography

NIST Authors in Bold

Author(s): Stephen Knight; Vivek M. Prabhu; John H. Burnett; James A. Liddle; Christopher L. Soles; Alain C. Diebold;
Title: Nanoelectronics Lithography
Published: March 01, 2011
Abstract: This is a compiled chapter that will be included into the Handbook of Nanophysics.
Citation: Handbook of Nanophysics
Publisher: Taylor & Francis, London, -1
Keywords: lithography, photoresist, electron beam, nanoimprint, metrology, DUV, EUV, ITRS roadmap
Research Areas: Direct-write lithography, Optical lithography, Inspection, Nanofabrication, Nanomanufacturing, and Nanoprocessing, Nanoimprint lithography, Electron beam lithography (EBL), Roadmaps