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Publication Citation: On the Sub-Nanometer Resolution of Scanning Electron and Helium Ion Microscopes

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Author(s): Andras Vladar; Michael T. Postek; Bin Ming;
Title: On the Sub-Nanometer Resolution of Scanning Electron and Helium Ion Microscopes
Published: March 01, 2009
Abstract: All forms of microscopy are being pushed to the limit by nanotechnology. Hence, there is a relentless quest to achieve better and better resolution with various electron and ion microscopes and to monitor and maintain these instruments to achieve the best possible performance levels. This paper discusses the NIST efforts to characterize reproducibly the resolution of scanning electron and ion microscopes.
Citation: Microscopy Today
Pages: pp. 6 - 13
Keywords: Helium ion microscope; metrology; sharpness; resolution; scanning electron microscopy; nanotechnology
Research Areas: Nanotechnology
PDF version: PDF Document Click here to retrieve PDF version of paper (529KB)