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NIST Authors in Bold
|Author(s):||Andras Vladar; Michael T. Postek; Bin Ming;|
|Title:||On the Sub-Nanometer Resolution of Scanning Electron and Helium Ion Microscopes|
|Published:||March 01, 2009|
|Abstract:||All forms of microscopy are being pushed to the limit by nanotechnology. Hence, there is a relentless quest to achieve better and better resolution with various electron and ion microscopes and to monitor and maintain these instruments to achieve the best possible performance levels. This paper discusses the NIST efforts to characterize reproducibly the resolution of scanning electron and ion microscopes.|
|Pages:||pp. 6 - 13|
|Keywords:||Helium ion microscope, metrology, sharpness, resolution, scanning electron microscopy, nanotechnology|
|PDF version:||Click here to retrieve PDF version of paper (529KB)|