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Publication Citation: Carbon Nanotube Tipped Atomic Force Microscopy for Measurement of <100nm Etch Morphology on Semiconductors

NIST Authors in Bold

Author(s): G Nagy; M Levy; R Scarmozzino; R M. Osgood; H Dai; R E. Smalley; Chris A. Michaels; G W. Flynn; G F. McLane;
Title: Carbon Nanotube Tipped Atomic Force Microscopy for Measurement of <100nm Etch Morphology on Semiconductors
Published: February 17, 1998
Abstract:
Citation: Applied Physics Letters
Volume: 73
Pages: pp. 529 - 531
Research Areas: Chemistry