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Publication Citation: Measuring the Ion Current in Electrical Discharges using Radio-frequency Current and Voltage Measurements

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Author(s): Mark A. Sobolewski;
Title: Measuring the Ion Current in Electrical Discharges using Radio-frequency Current and Voltage Measurements
Published: February 11, 1998
Abstract:
Citation: Applied Physics Letters
Volume: 72
Pages: pp. 1146 - 1148
Research Areas: Chemistry