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Publication Citation: In-Situ Conductivity Characterization of Oxide Thin Film Growth Phenomena on Microhotplates

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Author(s): F DiMeo; Richard E. Cavicchi; Stephen Semancik; John S. Suehle; N H. Tea; John A. Small; J T. Armstrong; J T. Kelliher;
Title: In-Situ Conductivity Characterization of Oxide Thin Film Growth Phenomena on Microhotplates
Published: February 11, 1998
Abstract:
Citation: Journal of Vacuum Science and Technology A
Volume: 16
Pages: pp. 131 - 138
Research Areas: Chemistry