Publication Citation
NIST Authors in Bold
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| Author(s): | F DiMeo; Richard E. Cavicchi; Stephen Semancik; John S. Suehle; N H. Tea; John A. Small; J T. Armstrong; J T. Kelliher; |
|---|---|
| Title: | In-Situ Conductivity Characterization of Oxide Thin Film Growth Phenomena on Microhotplates |
| Published: | February 11, 1998 |
| Abstract: | |
| Citation: | Journal of Vacuum Science and Technology A |
| Volume: | 16 |
| Pages: | pp. 131 - 138 |
| Research Areas: | Chemistry |