Publication Citation
NIST Authors in Bold
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| Author(s): | Michael T. Postek; Andras Vladar; Bin Ming; |
|---|---|
| Title: | On the Sub-Nanometer Resolution of Scanning Electron and Scanning Helium Ion Microscopes |
| Published: | March 01, 2009 |
| Abstract: | |
| Citation: | Microscopy Today |
| Pages: | pp. 6 - 13 |
| Research Areas: | Electron microscopy (EM, TEM, SEM, STEM), Metrology, Manufacturing |
| PDF version: |  Click here to retrieve PDF version of paper (517KB) |