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Publication Citation: On the Sub-Nanometer Resolution of Scanning Electron and Scanning Helium Ion Microscopes

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Author(s): Michael T. Postek; Andras Vladar; Bin Ming;
Title: On the Sub-Nanometer Resolution of Scanning Electron and Scanning Helium Ion Microscopes
Published: March 01, 2009
Abstract:
Citation: Microscopy Today
Pages: pp. 6 - 13
Research Areas: Electron microscopy (EM, TEM, SEM, STEM), Metrology, Manufacturing
PDF version: PDF Document Click here to retrieve PDF version of paper (529KB)