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Publication Citation: Influence of room temperature control system on AFM imaging

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Author(s): Joseph Fu; Wei Chu; Theodore V. Vorburger;
Title: Influence of room temperature control system on AFM imaging
Published: October 01, 2009
Abstract: As technology progresses, the control of environment for experiments is also getting more sophisticated; such as the control of lab temperature and vibration. Temperature controlled within ± 0.25° C for a general purpose lab is common place. We illustrate an experiment with such a stringent temperature control need. The variation in lab temperature can be observed from an AFM (atomic force microscopy) image of a straight edge. A Fast Fourier Transform (FFT) analysis on such AFM images links the frequency of waviness at the edge to the cycling of the damper and the reheating coil of the air conditioning feedback system. This unique frequency signal in all three axes of AFM images led us to conclude that the temperature affected the PZT scanner, which affected the measurement.
Citation: Journal of Vacuum Science and Technology B
Volume: 27
Issue: 5
Pages: pp. 2321 - 2323
Keywords: Atomic force microscope(AFM), Fast fourier transform(FFT), Temperature feedback system.
Research Areas: Dimensional Metrology, Metrology, Manufacturing