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Publication Citation: A Combinatorial Study of Metal Gate/HfO2 MOSCAPS

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Author(s): Martin L. Green; K S. Chang; Ichiro Takeuchi; T Chikyow;
Title: A Combinatorial Study of Metal Gate/HfO2 MOSCAPS
Published: September 01, 2006
Abstract:
Citation: ECS Transactions
Volume: 3
Issue: 3
Pages: pp. 341 - 350
Research Areas: Characterization, Ceramics
PDF version: PDF Document Click here to retrieve PDF version of paper (328KB)