Publication Citation
NIST Authors in Bold
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| Author(s): | Martin L. Green; K S. Chang; Ichiro Takeuchi; T Chikyow; |
|---|---|
| Title: | A Combinatorial Study of Metal Gate/HfO2 MOSCAPS |
| Published: | September 01, 2006 |
| Abstract: | |
| Citation: | ECS Transactions |
| Volume: | 3 |
| Issue: | 3 |
| Pages: | pp. 341 - 350 |
| Research Areas: | Characterization, Ceramics |
| PDF version: |  Click here to retrieve PDF version of paper (321KB) |