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Fabrication of GaN-based Nanoscale Device Structures Utilizing Focused Ion Beam Induced Pt Deposition

Published

Author(s)

Abhishek Motayed, A V. Davydov, Mark D. Vaudin, John Melngailis, S. N. Mohammad
Citation
Journal of Applied Physics
Volume
100
Issue
2

Citation

Motayed, A. , Davydov, A. , Vaudin, M. , Melngailis, J. and Mohammad, S. (2006), Fabrication of GaN-based Nanoscale Device Structures Utilizing Focused Ion Beam Induced Pt Deposition, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854231 (Accessed April 18, 2024)
Created July 15, 2006, Updated February 19, 2017