Publication Citation
NIST Authors in Bold
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| Author(s): | Vivek M. Prabhu; S Sambasivan; Daniel A. Fischer; Linda K. Sundberg; Robert D. Allen; |
|---|---|
| Title: | Quantitative depth profiling of photoacid generators in photoresist materials by near-edge x-ray absorption fine structure spectroscopy |
| Published: | November 15, 2006 |
| Abstract: | |
| Citation: | Applied Surface Science |
| Volume: | 253 |
| Issue: | 2 |
| Pages: | pp. 1010 - 1014 |
| Research Areas: | Characterization, Ceramics |
| PDF version: |  Click here to retrieve PDF version of paper (571KB) |