| Author(s): |
Peter K. Schenck; Jennifer L. Klamo; Nabil Bassim; Peter G. Burke; Yvonne B. Gerbig; Martin L. Green; |
| Title: |
Combinatorial study of the crystallinity boundary in the HfO2-TiO2-Y2O3 system using pulsed laser deposition library thin films |
| Published: |
May 16, 2008 |
| Abstract: |
HfO2-TiO2-Y2O3 is an interesting high-k dielectric system. Combinatorial library films of this system enable the study of the role of composition on phase formation as well as optical and mechanical properties. A library film of this system deposited at 400ºC exhibited a boundary line evident visually as well as in optical characterization. Mapping x-ray analysis showed the line corresponds to a crystallinity boundary, separating an amorphous phase and a FCC crystalline phase of yttrium hafnium oxide. Mapping nanoindentation across the boundary also revealed a sharp change in mechanical properties. The combinatorial technique is a powerful tool for high-throughput materials science, and by realizing this particularly unique PLD library film, allows many interesting materials phenomena and properties to be measured. |
| Citation: |
Thin Solid Films |
| Volume: |
517 |
| Pages: |
pp. 691 - 694 |
| Keywords: |
Combinatorial; Thin films; Reflectometry; X-ray diffraction; Nanoindentation |
| Research Areas: |
Semiconductors |
| PDF version: |
 Click here to retrieve PDF version of paper (528KB) |
