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Publication Citation: Combinatorial study of the crystallinity boundary in the HfO2-TiO2-Y2O3 system using pulsed laser deposition library thin films

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Author(s): Peter K. Schenck; Jennifer L. Klamo; Nabil Bassim; Peter G. Burke; Yvonne B. Gerbig; Martin L. Green;
Title: Combinatorial study of the crystallinity boundary in the HfO2-TiO2-Y2O3 system using pulsed laser deposition library thin films
Published: May 16, 2008
Abstract: HfO2-TiO2-Y2O3 is an interesting high-k dielectric system.  Combinatorial library films of this system enable the study of the role of composition on phase formation as well as optical and mechanical properties.  A library film of this system deposited at 400ºC exhibited a boundary line evident visually as well as in optical characterization.  Mapping x-ray analysis showed the line corresponds to a crystallinity boundary, separating an amorphous phase and a FCC crystalline phase of yttrium hafnium oxide.  Mapping nanoindentation across the boundary also revealed a sharp change in mechanical properties.  The combinatorial technique is a powerful tool for high-throughput materials science, and by realizing this particularly unique PLD library film, allows many interesting materials phenomena and properties to be measured.
Citation: Thin Solid Films
Volume: 517
Pages: pp. 691 - 694
Keywords: Combinatorial; Thin films; Reflectometry; X-ray diffraction; Nanoindentation
Research Areas: Semiconductors
PDF version: PDF Document Click here to retrieve PDF version of paper (541KB)