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Publication Citation: Lateral Length Scales of Latent Image Roughness as Determined by Off-Specular Neutron Reflectivity

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Author(s): Kristopher Lavery; Vivek M. Prabhu; Eric K. Lin; Wen-Li Wu; Sushil K. Satija; Kwang-Woo Choi; M Wormington;
Title: Lateral Length Scales of Latent Image Roughness as Determined by Off-Specular Neutron Reflectivity
Published: February 14, 2008
Abstract: A combination of specular and off-specular neutron reflectometry was used to measure the buried lateral roughness of the reaction-diffusion front in a model extreme ultraviolet lithography photoresist. Compositional heterogeneity at the latent reaction-diffusion front has been proposed as a major cause of line edge roughness in photolithographic features. This work marks the first experimental observation of the longitudial and lateral compositional heterogeneity of a latent image, revealing the buried lateral length scale as well as the amplitude of inhomogeneity at the reaction-diffusion front. These measurements aid in determining the origins of line edge roughness formation, while exploring the materials limits of the current chemically amplified photoresists.
Citation: Applied Physics Letters
Volume: 92
Pages: 3 pp.
Keywords: diffusion;line edge roughness;neutron reflectivity;off-specular reflectivity;photolithography
Research Areas: Polymers
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