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Publication Citation: Real Time Shape Evolution of Nanoimprinted Polymer Structures During Thermal Annealing

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Author(s): Ronald L. Jones; T Hu; Christopher L. Soles; Eric K. Lin; R M. Reano; Stella W. Pang; D M. Casa;
Title: Real Time Shape Evolution of Nanoimprinted Polymer Structures During Thermal Annealing
Published: July 18, 2006
Abstract: The real time shape of nanoimprinted polymer patterns are measured as a function of annealing temperature and time using a new metrology technique, Critical Dimension Small Angle X-ray Scattering (CD-SAXS). Periodicity, linewidth, line height, and sidewall angle are reported both below and above the bulk glass transition temperature (TG) for a nanoimprinted line/space pattern of poly(methyl methacrylate) (PMMA). For T > TG, shape changes are accelerated in early stages due to the reduction of high energy corners, yielding to a slowed rate in longer time regimes.
Citation: Nano Letters
Volume: 6
Issue: 8
Pages: pp. 1723 - 1728
Keywords: dimensional metrology;glass transition temperature;Nanoimprint Lithography;nanomechanics;small angle x-ray scattering
Research Areas: Nanomaterials
PDF version: PDF Document Click here to retrieve PDF version of paper (222KB)