Jones, R.
, Hu, T.
, Soles, C.
, Lin, E.
, Reano, R.
, Pang, S.
and Casa, D.
(2006),
Real Time Shape Evolution of Nanoimprinted Polymer Structures During Thermal Annealing, Nano Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852413
(Accessed April 18, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Real Time Shape Evolution of Nanoimprinted Polymer Structures During Thermal Annealing
Published
Author(s)
, , , , R M. Reano, Stella W. Pang, D M. Casa
Abstract
The real time shape of nanoimprinted polymer patterns are measured as a function of annealing temperature and time using a new metrology technique, Critical Dimension Small Angle X-ray Scattering (CD-SAXS). Periodicity, linewidth, line height, and sidewall angle are reported both below and above the bulk glass transition temperature (TG) for a nanoimprinted line/space pattern of poly(methyl methacrylate) (PMMA). For T > TG, shape changes are accelerated in early stages due to the reduction of high energy corners, yielding to a slowed rate in longer time regimes.Citation
Nano Letters
Volume
6
Issue
8
Pub Type
Journals
Download Paper
Keywords
dimensional metrology, glass transition temperature, Nanoimprint Lithography, nanomechanics, small angle x-ray scattering
Citation
Created July 18, 2006, Updated February 19, 2017