| Author(s): |
Jan Obrzut; |
| Title: |
Embedded Decoupling Capacitance Materials Characterization |
| Published: |
December 01, 2000 |
| Abstract: |
The dielectric constant of the embedded capacitance materials was measured in the frequency range from 100 Hz to 5 GHz. The testing included evaluation of the capacitance density, leakage current, and the effect of HAST on the capacitance. A test specimen and test procedure have been designed for dielectric characterization of the embedded capacitance materials and used as common test vehicles to compare dielectric constant of High K films that have recently been developed by the industry. The objectives of NIST involvement in this NCMS-led project was to develop and evaluate a test method suitable for dielectric permittivity of high K polymer composite films that covers broader functional frequency range including the microwave. |
| Citation: |
Embedded Decoupling Capacitance Project |
| Volume: |
91 |
| Pages: |
pp. 7-1 - 7-8 |
| Keywords: |
capacitor;dielectric constant;electronic;embedded;frequency;measurement;polymer;test pattern;thin film |
| Research Areas: |
Semiconductors |
| PDF version: |
 Click here to retrieve PDF version of paper (288KB) |
