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Publication Citation: Embedded Decoupling Capacitance Materials Characterization

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Author(s): Jan Obrzut;
Title: Embedded Decoupling Capacitance Materials Characterization
Published: December 01, 2000
Abstract: The dielectric constant of the embedded capacitance materials was measured in the frequency range from 100 Hz to 5 GHz. The testing included evaluation of the capacitance density, leakage current, and the effect of HAST on the capacitance. A test specimen and test procedure have been designed for dielectric characterization of the embedded capacitance materials and used as common test vehicles to compare dielectric constant of High K films that have recently been developed by the industry. The objectives of NIST involvement in this NCMS-led project was to develop and evaluate a test method suitable for dielectric permittivity of high K polymer composite films that covers broader functional frequency range including the microwave.
Citation: Embedded Decoupling Capacitance Project
Volume: 91
Pages: pp. 7-1 - 7-8
Keywords: capacitor;dielectric constant;electronic;embedded;frequency;measurement;polymer;test pattern;thin film
Research Areas: Semiconductors
PDF version: PDF Document Click here to retrieve PDF version of paper (295KB)