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|Author(s):||Z C. Ying; Mark Reitsma; Richard S. Gates;|
|Title:||Direct Measurement of Cantilever Spring Constants and Correction of Cantilever Irregularities Using an Instrumented Indenter|
|Published:||January 22, 2007|
|Abstract:||A method is presented that allows direct measurement of a wide range of spring constants of cantilevers using an indentation instrument with an integrated optical microscope. An accuracy of better than 10% can be achieved for spring constants from 0.1 N/m to 102 N/m. The technique makes it possible to measure the spring constant at any desired location on a cantilever of any shape, particularly at the tip location of an atomic force microscopy cantilever. The paper also demonstrates a technique to detect and correct apparent length anomalies of cantilevers by analyzing spring constants at multiple positions.|
|Citation:||Review of Scientific Instruments|
|Keywords:||atomic force microscopy,calibration,cantilever,indenter,spring constant,stiffness|
|Research Areas:||Characterization, Nanometrology, and Nanoscale Measurements|
|PDF version:||Click here to retrieve PDF version of paper (505KB)|