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Publication Citation: Direct Measurement of Cantilever Spring Constants and Correction of Cantilever Irregularities Using an Instrumented Indenter

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Author(s): Z C. Ying; Mark Reitsma; Richard S. Gates;
Title: Direct Measurement of Cantilever Spring Constants and Correction of Cantilever Irregularities Using an Instrumented Indenter
Published: January 22, 2007
Abstract: A method is presented that allows direct measurement of a wide range of spring constants of cantilevers using an indentation instrument with an integrated optical microscope. An accuracy of better than 10% can be achieved for spring constants from 0.1 N/m to 102 N/m. The technique makes it possible to measure the spring constant at any desired location on a cantilever of any shape, particularly at the tip location of an atomic force microscopy cantilever. The paper also demonstrates a technique to detect and correct apparent length anomalies of cantilevers by analyzing spring constants at multiple positions.
Citation: Review of Scientific Instruments
Volume: 78
Issue: 10
Keywords: atomic force microscopy;calibration;cantilever;indenter;spring constant;stiffness
Research Areas: Characterization, Nanometrology, and Nanoscale Measurements
PDF version: PDF Document Click here to retrieve PDF version of paper (505KB)