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Publication Citation: Characterization of Metal-Oxide Nanofilm Morphologies and Composition by Terahertz Transmission Spectroscopy

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Author(s): Edwin J. Heilweil; James E. Maslar; William A. Kimes; Nabil Bassim; Peter K. Schenck;
Title: Characterization of Metal-Oxide Nanofilm Morphologies and Composition by Terahertz Transmission Spectroscopy
Published: March 30, 2009
Abstract: An all-optical terahertz absorption technique for non-destructive characterization of nanometer-scale metal-oxide thin films grown on silicon substrates is described. Example measurements of laser and atomic layer-deposited films of HfO2, TiO3, Al2O3 and VOx as a function of deposition conditions and film thickness are described. This technique is found to be sensitive to HfO2 phonon modes in films with 5 nm nominal thickness.
Citation: Optics Letters
Volume: 34
Issue: No. 9
Pages: pp. 1360 - 1362
Keywords: nanometer films; metal oxides; terahertz; transmission spectroscopy; phonon modes; titanium oxide; hafnium oxide; far-infrared; morphology
Research Areas: Optical Metrology
PDF version: PDF Document Click here to retrieve PDF version of paper (277KB)