| Author(s): |
Edwin J. Heilweil; James E. Maslar; William A. Kimes; Nabil Bassim; Peter K. Schenck; |
| Title: |
Characterization of Metal-Oxide Nanofilm Morphologies and Composition by Terahertz Transmission Spectroscopy |
| Published: |
March 30, 2009 |
| Abstract: |
An all-optical terahertz absorption technique for non-destructive characterization of nanometer-scale metal-oxide thin films grown on silicon substrates is described. Example measurements of laser and atomic layer-deposited films of HfO2, TiO3, Al2O3 and VOx as a function of deposition conditions and film thickness are described. This technique is found to be sensitive to HfO2 phonon modes in films with 5 nm nominal thickness. |
| Citation: |
Optics Letters |
| Volume: |
34 |
| Issue: |
No. 9 |
| Pages: |
pp. 1360 - 1362 |
| Keywords: |
nanometer films; metal oxides; terahertz; transmission spectroscopy; phonon modes; titanium oxide; hafnium oxide; far-infrared; morphology |
| Research Areas: |
Optical Metrology |
| PDF version: |
 Click here to retrieve PDF version of paper (270KB) |
