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|Author(s):||Edwin J. Heilweil; James E. Maslar; William A. Kimes; Nabil Bassim; Peter K. Schenck;|
|Title:||Characterization of Metal-Oxide Nanofilm Morphologies and Composition by Terahertz Transmission Spectroscopy|
|Published:||March 30, 2009|
|Abstract:||An all-optical terahertz absorption technique for non-destructive characterization of nanometer-scale metal-oxide thin films grown on silicon substrates is described. Example measurements of laser and atomic layer-deposited films of HfO2, TiO3, Al2O3 and VOx as a function of deposition conditions and film thickness are described. This technique is found to be sensitive to HfO2 phonon modes in films with 5 nm nominal thickness.|
|Pages:||pp. 1360 - 1362|
|Keywords:||nanometer films, metal oxides, terahertz, transmission spectroscopy, phonon modes, titanium oxide, hafnium oxide, far-infrared, morphology|
|Research Areas:||Optical Metrology|
|PDF version:||Click here to retrieve PDF version of paper (277KB)|