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Publication Citation: 3D Molecular Imaging SIMS

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Author(s): John G. Gillen; Albert J. Fahey; M Wagner; Christine M. Mahoney;
Title: 3D Molecular Imaging SIMS
Published: July 01, 2006
Abstract: Thin monolayer and bilayer filsm of spin cast poly(methyl methacrylate) (PMMA), poly(2-hydroxyethyl methacrylate) (PHEMA), poly(lactic) acid (PLA) and PLA doped with several pharmaceuticals have been analyzed by dynamic SIMS using SF5+ polyatomic primary ion bombardment. Each of these systems exhibited minimal primary beam-induced degradation under cluster bombardment allowing molecular depth profiles to be obtained through the depth of the film. By combing secondary ion imaging with depth profiling, 3-dimensional molecular image depth profiles have been obtained from these systems. In another approach, bevel cross sections are cut in the samples with the SF5+ primary ion beam to produce a laterally magnified cross section of the sample that does not contain the beam-induced damage that would be induced by conventional ion beam FIB cross sectioning. The bevel surface can then be examined using cluster SIMS imaging or other appropriate microanalysis technique.
Citation: Applied Surface Science
Keywords: beam-induced damage;cluster bombardment;depth profile;secondary ion mass spectrometry
Research Areas: Nanotechnology, Chemistry