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Publication Citation: Chemical Characterization of Silicon-Germanium Single Crystals - Initial Evaluation of the Extent of Heterogeneity

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Author(s): Ryna B. Marinenko; J T. Armstrong; Shirley Turner; Eric B. Steel; F A. Stevie;
Title: Chemical Characterization of Silicon-Germanium Single Crystals - Initial Evaluation of the Extent of Heterogeneity
Published: August 01, 2002
Abstract: Initial heterogeneity testing with the electron microprobe using WDS of three SiGe wafers cut from single-crystal boules of different concentrations (nominally 3.5, 6.5, and 14 atomic % Ge) is described. Random and repeat samplings over the entire surfaces were used to determine the between sector (or sample), the between point, and the experimental variances. These variances were later used to calculate the overall uncertainty contribution from heterogeneity only for each specimen. In addition 2-υm and 5-υm step traverses were used to determine if heterogeneity was present over short distances. The two wafers that were higher in Ge concentration were found to be more homogeneous than the 3.5 atomic % Ge wafer.
Conference: Microscopy and Microanalysis 2002
Volume: 8
Issue: Supp. 1
Location: Quebec, -1
Dates: August 5-8, 2002
Keywords: electron microprobe;heterogeneity testing;homogeneity;SiGe;SiGe single crystals;uncertainty;variances;wavelength dispersive spectroscopy (WDS);x-ray traverses
Research Areas: Standard Reference Data