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|Author(s):||A S. Bakulin; S M. Durbin; C Liu; J Erdmann; A T. Macrander; Terrence J. Jach;|
|Title:||Use of Kirkpatrick-Baez Multilayer Optics for X-Ring Fluorescence Imaging|
|Published:||July 01, 1998|
|Abstract:||We discuss the possibilities for using Kirkpatrick-Baez (K-B) multilayer elements to directly image the fluorescence distribution from a specimen under x-ray illumination. X-ray fluorescence would be collected by K-B elements close in contrast to the use of K-B optics to form a microprobe beam that is rastered across a surface while the x-ray fluorescence is recorded to form a fluorescent image. Tungsten-carbon multilayers on curved substrates have been fabricated at the Advanced Photo Source, and their focussing properties have been characterized by a laboratory x-ray source. Synchroto applications would illuminate specimens with lithographic patterns, for example, with the image being formed at an x-ray CCD camera. The ability to form an x-ray fluorescent image, and therefore a map of the specimen's elemental distribution near the surface, could provide a useful analytical tool without the usual need for a microfocusing beam. Furthermore, there are interesting possibilities offered by combining fluorescence imaging with x-ray near edge absorption spectroscopy (XANES), extended x-ray absorption spectroscopy (EXAFS), and x-ray standing waves.|
|Citation:||Proceedings of the SPIE: Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray|
|Pages:||pp. 218 - 223|
|Keywords:||Kirkpatric-Baez optics,multilayer x-ray optics,x-ray fluorescence|