Use of Kirkpatrick-Baez Multilayer Optics for X-Ring Fluorescence Imaging

Published

July 1, 1998

Author(s)

A S. Bakulin, S M. Durbin, C Liu, J Erdmann, A T. Macrander, Terrence J. Jach

Abstract

We discuss the possibilities for using Kirkpatrick-Baez (K-B) multilayer elements to directly image the fluorescence distribution from a specimen under x-ray illumination. X-ray fluorescence would be collected by K-B elements close in contrast to the use of K-B optics to form a microprobe beam that is rastered across a surface while the x-ray fluorescence is recorded to form a fluorescent image. Tungsten-carbon multilayers on curved substrates have been fabricated at the Advanced Photo Source, and their focussing properties have been characterized by a laboratory x-ray source. Synchroto applications would illuminate specimens with lithographic patterns, for example, with the image being formed at an x-ray CCD camera. The ability to form an x-ray fluorescent image, and therefore a map of the specimen's elemental distribution near the surface, could provide a useful analytical tool without the usual need for a microfocusing beam. Furthermore, there are interesting possibilities offered by combining fluorescence imaging with x-ray near edge absorption spectroscopy (XANES), extended x-ray absorption spectroscopy (EXAFS), and x-ray standing waves.

Citation

Proceedings of the SPIE: Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray

Volume

6266

Pub Type

Journals

Keywords

Kirkpatric-Baez optics, multilayer x-ray optics, x-ray fluorescence

Citation

Bakulin, A. , Durbin, S. , Liu, C. , Erdmann, J. , Macrander, A. and Jach, T. (1998), Use of Kirkpatrick-Baez Multilayer Optics for X-Ring Fluorescence Imaging, Proceedings of the SPIE: Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray (Accessed April 20, 2024)