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Publication Citation: Use of Kirkpatrick-Baez Multilayer Optics for X-Ring Fluorescence Imaging

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Author(s): A S. Bakulin; S M. Durbin; C Liu; J Erdmann; A T. Macrander; Terrence J. Jach;
Title: Use of Kirkpatrick-Baez Multilayer Optics for X-Ring Fluorescence Imaging
Published: July 01, 1998
Abstract: We discuss the possibilities for using Kirkpatrick-Baez (K-B) multilayer elements to directly image the fluorescence distribution from a specimen under x-ray illumination. X-ray fluorescence would be collected by K-B elements close in contrast to the use of K-B optics to form a microprobe beam that is rastered across a surface while the x-ray fluorescence is recorded to form a fluorescent image. Tungsten-carbon multilayers on curved substrates have been fabricated at the Advanced Photo Source, and their focussing properties have been characterized by a laboratory x-ray source. Synchroto applications would illuminate specimens with lithographic patterns, for example, with the image being formed at an x-ray CCD camera. The ability to form an x-ray fluorescent image, and therefore a map of the specimen's elemental distribution near the surface, could provide a useful analytical tool without the usual need for a microfocusing beam. Furthermore, there are interesting possibilities offered by combining fluorescence imaging with x-ray near edge absorption spectroscopy (XANES), extended x-ray absorption spectroscopy (EXAFS), and x-ray standing waves.
Citation: Proceedings of the SPIE: Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray
Volume: 6266
Pages: pp. 218 - 223
Keywords: Kirkpatric-Baez optics,multilayer x-ray optics,x-ray fluorescence
Research Areas: Physics