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Developing advanced humidity standards to measure trace water vapor in specialty gases
Published
Author(s)
Joseph T. Hodges, Gregory E. Scace
Abstract
We describe primary thermodynamic standards for trace humidity generation maintained at NIST. Also, a discussion of NIST calibration services providing traceability of transfer standards to NIST primary standards is presented. Applications to the metrology relevant to the production and delivery of high-purity specialty gases for semiconductor manufacturing are discussed.
Hodges, J.
and Scace, G.
(2006),
Developing advanced humidity standards to measure trace water vapor in specialty gases, Micro
(Accessed April 24, 2024)