| Author(s): |
JiYoung Chu; Quandou Wang; John P. Lehan; Ulf Griesmann; Guangjun Gao; |
| Title: |
Measuring the Phase Transfer Function of a Phase-Shifting Interferometer |
| Published: |
August 13, 2008 |
| Abstract: |
In characterizing the performance of a phase-shifting interferometer, the dependence of the measured height on the spatial frequency is rarely considered. We describe a test mirror with a special height relief that can be used to measure the height transfer function for the interferometer in a fashion analogous to the measurement of the modulation transfer function for the optical imaging system. We fabricated the test mirror at the National Institute of Standards and Technology (NIST) using a lithography-based process. The test mirror has several patterns (reminiscent of moth antennae) with variable spacing in radial direction. We describe the fabrication of the test mirror and its application to test the performance of the interferometer. |
| Conference: |
SPIE Optics and Photonics 2008 |
| Proceedings: |
Proceedings of SPIE Volume 7064: Interferometry XIV: Applications |
| Volume: |
7064 |
| Pages: |
pp. 70640C-1 - 70640C-8 |
| Location: |
San Diego, CA |
| Dates: |
August 10-14, 2008 |
| Keywords: |
Modulation transfer function, height transfer function, interferometer, lithography. |
| Research Areas: |
Metrology |
| PDF version: |
 Click here to retrieve PDF version of paper (3MB) |
