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Publication Citation: Helium Ion Microscopy and its Application to Nanotechnology and Nanometrology

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Author(s): Michael T. Postek; Andras Vladar;
Title: Helium Ion Microscopy and its Application to Nanotechnology and Nanometrology
Published: November 04, 2008
Abstract:
Citation: Scanning
Volume: 30
Pages: pp. 457 - 462
Keywords: Helium ion; HIM; microscopy; scanning electron microscope; SEM; nanomanufacturing; nanometrology
Research Areas: Metrology, Nanomanufacturing, Manufacturing