Publication Citation
NIST Authors in Bold
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| Author(s): | Michael T. Postek; Andras Vladar; |
|---|---|
| Title: | Helium Ion Microscopy and its Application to Nanotechnology and Nanometrology |
| Published: | November 04, 2008 |
| Abstract: | |
| Citation: | Scanning |
| Volume: | 30 |
| Pages: | pp. 457 - 462 |
| Keywords: | Helium ion; HIM; microscopy; scanning electron microscope; SEM; nanomanufacturing; nanometrology |
| Research Areas: | Metrology, Nanomanufacturing, Manufacturing |