| Author(s): |
Ravikiran Attota; Richard M. Silver; |
| Title: |
Through-focus scanning optical microscope imaging method for nano-scale dimensional analysis |
| Published: |
September 01, 2008 |
| Abstract: |
We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope, by analyzing two-dimensional through-focus scanning optical microscope (TSOM) images constructed using a set of images obtained at different focus positions. The TSOM images enable one to (i) positively identify the dimension that is different between two nano-sized targets, (ii) determine magnitude of its difference, and (iii) determine the actual dimension by a library matching method. This methodology has potential usefulness for a wide range of targets, geometries and application areas, including, nano-metrology, micro/nanotechnology, semiconductor technology, biotechnology, process control, defect analysis, and nano-manufacturing. |
| Citation: |
Optics Letters |
| Volume: |
33 |
| Issue: |
17 |
| Pages: |
pp. 1990 - 1992 |
| Keywords: |
Optical microscope, TSOM, Nano-metrology, Micro/nanotechnology, Semiconductor technology, Biotechnology, Process control; Defect analysis; Nano-manufacturing. |
| Research Areas: |
Metrology, Nanomanufacturing, Manufacturing |
| PDF version: |
 Click here to retrieve PDF version of paper (305KB) |
