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Publication Citation: Through-focus scanning optical microscope imaging method for nano-scale dimensional analysis

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Author(s): Ravikiran Attota; Richard M. Silver;
Title: Through-focus scanning optical microscope imaging method for nano-scale dimensional analysis
Published: September 01, 2008
Abstract: We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope, by analyzing two-dimensional through-focus scanning optical microscope (TSOM) images constructed using a set of images obtained at different focus positions. The TSOM images enable one to (i) positively identify the dimension that is different between two nano-sized targets, (ii) determine magnitude of its difference, and (iii) determine the actual dimension by a library matching method. This methodology has potential usefulness for a wide range of targets, geometries and application areas, including, nano-metrology, micro/nanotechnology, semiconductor technology, biotechnology, process control, defect analysis, and nano-manufacturing.
Citation: Optics Letters
Volume: 33
Issue: 17
Pages: pp. 1990 - 1992
Keywords: Optical microscope, TSOM, Nano-metrology, Micro/nanotechnology, Semiconductor technology, Biotechnology, Process control; Defect analysis; Nano-manufacturing.
Research Areas: Metrology, Nanomanufacturing, Manufacturing
PDF version: PDF Document Click here to retrieve PDF version of paper (313KB)