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Publication Citation: Progress on Implementation of a Reference Measurement System based on a Critical-dimension Atomic Force Microscope

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Author(s): Ndubuisi G. Orji; Angela Martinez; B Bunday; J Allgair; Theodore V. Vorburger;
Title: Progress on Implementation of a Reference Measurement System based on a Critical-dimension Atomic Force Microscope
Published: April 01, 2007
Abstract:
Citation: J. Micro/Nanolith
Volume: 6
Issue: 2
Research Areas: Metrology, Manufacturing