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Publication Citation: Nano- and Atomic-Scale Length Metrology

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Author(s): Theodore V. Vorburger; Ronald G. Dixson; Joseph Fu; Ndubuisi G. Orji; Shaw C. Feng; Michael W. Cresswell; Richard A. Allen; William F. Guthrie; Wei Chu;
Title: Nano- and Atomic-Scale Length Metrology
Published: December 14, 2007
Abstract:
Conference: 5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007)
Proceedings: Proc. 5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007) (Allied Publishers Pvt. Ltd, Chennai, 2007)
Pages: pp. 13 - 18
Location: Trivandrum, IN
Dates: December 14, 2007
Research Areas: Metrology, Manufacturing
PDF version: PDF Document Click here to retrieve PDF version of paper (212KB)