| Author(s): |
Theodore V. Vorburger; Ronald G. Dixson; Joseph Fu; Ndubuisi G. Orji; Shaw C. Feng; Michael W. Cresswell; Richard A. Allen; William F. Guthrie; Wei Chu; |
| Title: |
Nano- and Atomic-Scale Length Metrology |
| Published: |
December 14, 2007 |
| Abstract: |
|
| Conference: |
5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007) |
| Proceedings: |
Proc. 5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007) (Allied Publishers Pvt. Ltd, Chennai, 2007) |
| Pages: |
pp. 13 - 18 |
| Location: |
Trivandrum, IN |
| Dates: |
December 14, 2007 |
| Research Areas: |
Metrology, Manufacturing |
