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Publication Citation: Design of an On-Chip Micro-Scale Nanoassembly System

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Author(s): Jason J. Gorman; Yong Sik Kim; Andras Vladar; Nicholas G. Dagalakis;
Title: Design of an On-Chip Micro-Scale Nanoassembly System
Published: November 03, 2006
Abstract: In this paper, the design and proposed operation of a MEMS-based nanoassembly system is presented. The nanoassembly system is comprised of four nanomanipulators that can work independently or cooperatively. The design of the nanomanipulators will be discussed and experimental characterization results for one nanomanipulator will be presented. Three critical research issues for this project are then discussed: nanomanipulation strategies using the nanoassembly system; MEMS precision motion control; and integration of the on-chip nanoassembly system with a scanning electron microscope / focused ion beam instrument to obtain a complete nanomanufacturing environment.
Conference: International Symposium on Nanomanufacturing
Proceedings: Proceedings of the International Symposium on Nanomanufacturing | 2006| ISN
Pages: pp. 160 - 165
Location: Cambridge, MA
Dates: November 3, 2006
Keywords: MEMS;nanoassembly;nanomanipulation
Research Areas: Nanomanufacturing
PDF version: PDF Document Click here to retrieve PDF version of paper (917KB)