| Author(s): |
Bradley N. Damazo; Crossley E. Jayewardene; Andras Vladar; William J. Keery; Michael T. Postek; |
| Title: |
New Method for the Measurement of SEM Stage Vibrations |
| Published: |
February 01, 2004 |
| Abstract: |
|
| Conference: |
Proceedings of SPIE--the International Society for Optical Engineering |
| Proceedings: |
Metrology, Inspection and Process Control for Microlithography | 18th | Proceedings of the SPIE--the International Society for Optical Engineering: Metrology, Inspection and Process Control for Microlithography XVIII, 2004 | SPIE |
| Volume: |
5375 |
| Issue: |
Part 2 |
| Dates: |
February 23-27, 2004 |
| Keywords: |
interferometer;laser;magnification;sample state;SEM;vibration |
| Research Areas: |
Nanomanufacturing |
