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Publication Citation: New Method for the Measurement of SEM Stage Vibrations

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Author(s): Bradley N. Damazo; Crossley E. Jayewardene; Andras Vladar; William J. Keery; Michael T. Postek;
Title: New Method for the Measurement of SEM Stage Vibrations
Published: February 01, 2004
Abstract:
Conference: Proceedings of SPIE--the International Society for Optical Engineering
Proceedings: Metrology, Inspection and Process Control for Microlithography | 18th | Proceedings of the SPIE--the International Society for Optical Engineering: Metrology, Inspection and Process Control for Microlithography XVIII, 2004 | SPIE
Volume: 5375
Issue: Part 2
Dates: February 23-27, 2004
Keywords: interferometer;laser;magnification;sample state;SEM;vibration
Research Areas: Nanomanufacturing