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|Author(s):||Xiaoping Qian; John S. Villarrubia;|
|Title:||General Three-Dimensional Image Simulation and Surface Reconstruction in Scanning Probe Microscopy Using a Dexel Representation|
|Published:||January 01, 2007|
|Abstract:||The ability to image complex general three-dimensional (3D) structures, including re-entrant surfaces and undercut features using scanning probe microscopy, is becoming increasing important in many small length-scale applications. This paper presents a dexel data representation and its algorithm implementation for SPM image simulation (morphological dilation) and surface reconstruction (erosion) on such general three-dimensional structures. Validation using simulations, some of which are modeled upon actual AFM data, demonstrates that the dexel representation can efficiently simulate SPM imaging and reconstruct the sample surface from measured images, including those with re-entrant surfaces and undercut features. (23 references).|
|Pages:||pp. 29 - 42|
|Keywords:||atomic force microscopy,dexel representation,dilation,erosion,mathematical morphology,scanning probe microscopy|
|Research Areas:||Manufacturing, Metrology|