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Publication Citation: The Limits of Image-Based Optical Metrology

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Author(s): Richard M. Silver; Bryan M. Barnes; Ravikiran Attota; Jay S. Jun; James J. Filliben; Juan Soto; Michael T. Stocker; P Lipscomb; Egon Marx; Heather J. Patrick; Ronald G. Dixson; Robert D. Larrabee;
Title: The Limits of Image-Based Optical Metrology
Published: March 01, 2006
Abstract: An overview of the challenges encountered in imaging device-sized features using optical techniques recently developed in our laboratories is presented in this paper.  We have developed a set of techniques we refer to as scatterfield microscopy which allows us to engineer the illumination in combination with appropriately designed metrology targets.  The techniques have previously been applied to samples with sub-50 nm sized features having pitches larger than the conventional Rayleigh resolution criterion which results in images having edge contrast and elements of conventional imaging.  In this paper we extend these methods to targets composed of features much denser than the conventional Rayleigh resolution criterion.  For these applications, a new approach is presented which uses a combination of zero order optical response and edge-based imaging.
Conference: Metrology, Inspection, and Process Control for Microlithography XX
Proceedings: Proceedings of SPIE
Volume: 6152
Pages: 15 pp.
Location: San Jose, CA
Dates: February 19-24, 2006
Keywords: imaging device-sized features;optical techniques
Research Areas: Metrology, Manufacturing