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PUBLICATIONS

Fiber Deflection Probe Uncertainty Analysis for Micro Holes

Published

Author(s)

Bala Muralikrishnan, Jack A. Stone Jr., John R. Stoup

Abstract

We have recently reported on a new probe, the Fiber Deflection Probe (FDP), for diameter and form measurement of large aspect ratio micro-holes (100 um nominal diameter, 5 mm deep). In this paper, we briefly review the measurement principle of the FDP. Then, we discuss different error sources and present uncertainty budget for diameter measurements. Our analysis indicates an expanded uncertainty of only 0.07 um on diameter.
Citation
NCSL International Measure: The Journal of Measurement Science 2006
Pub Type
Journals

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Keywords

coordinate metrology, fiber probe, microfeature metrology, small hole, uncertainty analysis
Metrology and Manufacturing

Citation

Muralikrishnan, B. , Stone Jr., J. and Stoup, J. (2006), Fiber Deflection Probe Uncertainty Analysis for Micro Holes, NCSL International Measure: The Journal of Measurement Science 2006, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823200 (Accessed April 24, 2024)

Created December 31, 2005, Updated October 12, 2021