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Publication Citation: Line Edge Roughness Metrology Using Atomic Force Microscopes

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Author(s): Ndubuisi G. Orji; Theodore V. Vorburger; Joseph Fu; Ronald G. Dixson; C V. Nguyen; Jayaraman Raja;
Title: Line Edge Roughness Metrology Using Atomic Force Microscopes
Published: January 01, 2005
Abstract: Line edge roughness measurements using two types of atomic force microscopes and two types of tips are compared. Measurements were made on specially prepared samples with inscribed edge roughness of different amplitudes and wavelengths. The spatial wavelengths each instrument was able to measure were also compared. Techniques on checking the noise level of LER measuring instruments are highlighted.
Citation: Measurement Science & Technology
Volume: 16
Pages: pp. 2147 - 2154
Keywords: atomic force microscope;carbon nanotube;line edge roughness
Research Areas: Metrology, Manufacturing