| Author(s): |
Ndubuisi G. Orji; Theodore V. Vorburger; Joseph Fu; Ronald G. Dixson; C V. Nguyen; Jayaraman Raja; |
| Title: |
Line Edge Roughness Metrology Using Atomic Force Microscopes |
| Published: |
January 01, 2005 |
| Abstract: |
Line edge roughness measurements using two types of atomic force microscopes and two types of tips are compared. Measurements were made on specially prepared samples with inscribed edge roughness of different amplitudes and wavelengths. The spatial wavelengths each instrument was able to measure were also compared. Techniques on checking the noise level of LER measuring instruments are highlighted. |
| Citation: |
Measurement Science & Technology |
| Volume: |
16 |
| Pages: |
pp. 2147 - 2154 |
| Keywords: |
atomic force microscope;carbon nanotube;line edge roughness |
| Research Areas: |
Metrology, Manufacturing |
