Publication Citation
NIST Authors in Bold
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| Author(s): | H Kuramochi; F Perez-murano; John A. Dagata; H Yokoyama; |
|---|---|
| Title: | Faradaic Current Detection During Anodic-Oxidation of the H-Passivatedp-Si(001) Surface With Controlled Relative Humidity |
| Published: | March 01, 2004 |
| Abstract: | |
| Citation: | Nanotechnology |
| Volume: | 15 |
| Issue: | No. 3 |
| Keywords: | Faradaic current;scanning probe oxidation;silicon;space charge |
| Research Areas: | Metrology, Manufacturing |