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Publication Citation: Faradaic Current Detection During Anodic-Oxidation of the H-Passivatedp-Si(001) Surface With Controlled Relative Humidity

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Author(s): H Kuramochi; F Perez-murano; John A. Dagata; H Yokoyama;
Title: Faradaic Current Detection During Anodic-Oxidation of the H-Passivatedp-Si(001) Surface With Controlled Relative Humidity
Published: March 01, 2004
Abstract:
Citation: Nanotechnology
Volume: 15
Issue: No. 3
Keywords: Faradaic current,scanning probe oxidation,silicon,space charge
Research Areas: Metrology, Manufacturing