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Publication Citation: Current, Charge, and Capacitance During Scanning Probe Oxidation. II Electrostatic and Meniscus Forces Acting on Cantilever Bending

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Author(s): John A. Dagata; F Perez-murano; C Martin; H Kuramochi; H Yokoyama;
Title: Current, Charge, and Capacitance During Scanning Probe Oxidation. II Electrostatic and Meniscus Forces Acting on Cantilever Bending
Published: August 01, 2004
Abstract:
Citation: Journal of Applied Physics
Volume: 96
Issue: No. 4
Keywords: nanolithography;scanning probe oxidation;silicon;space charge
Research Areas: Metrology, Manufacturing