Publication Citation
NIST Authors in Bold
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| Author(s): | John A. Dagata; F Perez-murano; C Martin; H Kuramochi; H Yokoyama; |
|---|---|
| Title: | Current, Charge, and Capacitance During Scanning Probe Oxidation. II Electrostatic and Meniscus Forces Acting on Cantilever Bending |
| Published: | August 01, 2004 |
| Abstract: | |
| Citation: | Journal of Applied Physics |
| Volume: | 96 |
| Issue: | No. 4 |
| Keywords: | nanolithography;scanning probe oxidation;silicon;space charge |
| Research Areas: | Metrology, Manufacturing |