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Publication Citation: Surface Metrology Algorithm Testing System

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Author(s): Son H. Bui; Theodore V. Vorburger;
Title: Surface Metrology Algorithm Testing System
Published: January 01, 2007
Abstract: This paper presents the development of a Web-based surface metrology algorithm testing system. The system includes surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The system runs from a web site at the National Institute of Standards and Technology (NIST), USA. Manufacturers, instrument makers, and researchers have Internet access to standard data sets and analysis tools located on a NIST server. The system serves to validate the accuracy of algorithms as well as the calculation of surface parameters in industry. The System can be accessed through http://ats.nist.gov/VSC/jsp.
Citation: Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
Volume: 31
Pages: pp. 218 - 225
Keywords: database,filtering,internet,parameters,software,surface,textures,topography,Web site
Research Areas: Metrology, Manufacturing