| Author(s): |
Son H. Bui; Theodore V. Vorburger; |
| Title: |
Surface Metrology Algorithm Testing System |
| Published: |
January 01, 2007 |
| Abstract: |
This paper presents the development of a Web-based surface metrology algorithm testing system. The system includes surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The system runs from a web site at the National Institute of Standards and Technology (NIST), USA. Manufacturers, instrument makers, and researchers have Internet access to standard data sets and analysis tools located on a NIST server. The system serves to validate the accuracy of algorithms as well as the calculation of surface parameters in industry. The System can be accessed through http://ats.nist.gov/VSC/jsp. |
| Citation: |
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology |
| Volume: |
31 |
| Pages: |
pp. 218 - 225 |
| Keywords: |
database;filtering;internet;parameters;software;surface;textures;topography;Web site |
| Research Areas: |
Metrology, Manufacturing |
