| Author(s): |
Andras Vladar; Michael T. Postek; Nien F. Zhang; Robert D. Larrabee; Samuel N. Jones; Russell E. Hajdaj; |
| Title: |
Reference Material 8091: New Scanning Electron Microscope Sharpness Standard |
| Published: |
August 01, 2001 |
| Abstract: |
Reference Material (RM 8091) is intended primarily for use in checking the sharpness performance of scanning electron microscopes. It is supplied as a small, approximately 2 mm x 2 mm diced semiconductor chip. This sample is capable of being mounted directly onto a wafer, wafer piece or specimen stub for insertion into a laboratory or wafer inspection scanning electron microscope. The chip can also be mounted onto a drop-in type wafer holder. This Reference Material is fully compatible with state-of-the-art integrated circuit technology. |
| Conference: |
Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor |
| Proceedings: |
Proceedings of SPIE |
| Location: |
Santa Clara, CA |
| Dates: |
February 26, 2001 |
| Keywords: |
CD;CD-SEM;measurement;metrology;performance;reference material;scanning electron microscope;SEM;standard |
| Research Areas: |
Metrology, Manufacturing |
