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Publication Citation: Reference Material 8091: New Scanning Electron Microscope Sharpness Standard

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Author(s): Andras Vladar; Michael T. Postek; Nien F. Zhang; Robert D. Larrabee; Samuel N. Jones; Russell E. Hajdaj;
Title: Reference Material 8091: New Scanning Electron Microscope Sharpness Standard
Published: August 01, 2001
Abstract: Reference Material (RM 8091) is intended primarily for use in checking the sharpness performance of scanning electron microscopes. It is supplied as a small, approximately 2 mm x 2 mm diced semiconductor chip. This sample is capable of being mounted directly onto a wafer, wafer piece or specimen stub for insertion into a laboratory or wafer inspection scanning electron microscope. The chip can also be mounted onto a drop-in type wafer holder. This Reference Material is fully compatible with state-of-the-art integrated circuit technology.
Conference: Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor
Proceedings: Proceedings of SPIE
Location: Santa Clara, CA
Dates: February 26, 2001
Keywords: CD;CD-SEM;measurement;metrology;performance;reference material;scanning electron microscope;SEM;standard
Research Areas: Metrology, Manufacturing