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NIST Authors in Bold
|Author(s):||Andras Vladar; Michael T. Postek; Nien F. Zhang; Robert D. Larrabee; Samuel N. Jones; Russell E. Hajdaj;|
|Title:||Reference Material 8091: New Scanning Electron Microscope Sharpness Standard|
|Published:||August 01, 2001|
|Abstract:||Reference Material (RM 8091) is intended primarily for use in checking the sharpness performance of scanning electron microscopes. It is supplied as a small, approximately 2 mm x 2 mm diced semiconductor chip. This sample is capable of being mounted directly onto a wafer, wafer piece or specimen stub for insertion into a laboratory or wafer inspection scanning electron microscope. The chip can also be mounted onto a drop-in type wafer holder. This Reference Material is fully compatible with state-of-the-art integrated circuit technology.|
|Conference:||Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor|
|Proceedings:||Proceedings of SPIE|
|Location:||Santa Clara, CA|
|Dates:||February 26, 2001|
|Keywords:||CD,CD-SEM,measurement,metrology,performance,reference material,scanning electron microscope,SEM,standard|
|Research Areas:||Metrology, Manufacturing|