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Publication Citation: Algorithm for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation

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Author(s): John S. Villarrubia;
Title: Algorithm for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation
Published: July 01, 1997
Abstract:
Citation: Journal of Research (NIST JRES) -
Volume: 102 No. 4
Keywords: algorithms;atomic force microscopy;blind reconstruction;dimensional metrology;image simulation;mathematical morphology;scanned probe microscopy;scanning tunneling microscopy;surface reconstruction
Research Areas: Metrology, Manufacturing